Joining

Vacuum brazing and soldering

Joining
Outline
This is brazing and soldering using a vacuum furnace. Flux is not used, so processing to eliminate the flux is unnecessary. Brazing is performed in a high vacuum, making possible a highly clean brazing without coloration. Further, joining of layer with high dimensional accuracy and airtightness is possible.
Applications
  • Upper electrode plates for semiconductor manufacturing device
  • Pneumatic pressurizer parts
  • Heat exchangers for helium liquidation in linear motor cars
  • Mass flow controller parts
Joining
Characteristics
  • Complex internal liquid or gas flow paths can be configured in three dimensions. Multiple joins can be made simultaneously.
    Joining2
    (Enlarged diagram of Upper electrode plates cross-section)
  • Multiple joins can be made simultaneously.
  • Flow paths with low airtightness at the helium leak level can be manufactured.
    Joining3
  • We can handle all areas consistently, from materials designation to mechanical processing, joining and surface processing, etc.
Specifications
Joining base metals: It is possible to join stainless steel, heat-resistant alloys, steel, and aluminum alloys.
Piece size: Manufacturing is possible up to device parts of Ф400mm.
Equipment Possessed
Large pressurization vacuum furnace
Large vacuum furnace
Contact:
Equipment Parts Department
at +81-3-3270-8852
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Electron beam welding

Joining
Outline
Electron beam welding is a method of welding that creates an electron beam in a vacuum, and methods metal by aiming the electron beam at the object to be welded. As the power density is extremely high, the melting band is narrow, enabling deep melding to be obtained. Further, as welding is performed in a vacuum, there is no contamination from the air, such as oxidation or nitriding.
Applications
  • Welding metals with high melting point (Tungsten, Tantalum, etc.)
  • Welding metals with high thermal conductivity (Aluminum, Copper, etc.)
  • Welding dissimilar metals

Characteristics

  • The melting band is narrow, enabling deep melding to be obtained.
    Electron beam welding
  • The thermal effects are small, enabling warping during welding to be suppressed to a minimum.
  • Enables metals with a high melting point to be welded, and metals with high thermal conductivity to be welded.
  • As welding is performed in a vacuum, there is no oxidation or nitriding to the welded parts.
  • We can handle all areas consistently, from materials designation to machining, bonding and surface processing, etc.
Specifications
  • Acceleration voltage: 150kV
  • Electron beam current: 100mA
  • Electron beam output: Max. 15kW
  • Table size: 400 x 420
  • Moveable range: 380(X) x 380(Y)
Contact:
Equipment Parts Department
at +81-3-3270-8852
Technical Information
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